Yuta NAKANE

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Etching method, substrate processing apparatus, and substrate proce...
- Patent number 12,112,954
- Issue date Oct 8, 2024
- Tokyo Electron Limited
- Maju Tomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 12,100,578
- Issue date Sep 24, 2024
- Tokyo Electron Limited
- Sho Kumakura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Etching method, plasma processing apparatus, and substrate processi...
- Patent number 11,476,123
- Issue date Oct 18, 2022
- Tokyo Electron Limited
- Takayuki Katsunuma
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR CLEANING CHAMBER OR COMPONENT, SUBSTRATE PROCESSING METH...
- Publication number 20240165677
- Publication date May 23, 2024
- TOKYO ELECTRON LIMITED
- Yuta NAKANE
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240128092
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Yuta NAKANE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING SYSTEM, PLASMA PROCESSING APPARATUS, AND ETCHING...
- Publication number 20240112918
- Publication date Apr 4, 2024
- TOKYO ELECTRON LIMITED
- Noboru SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND PLASMA PROCESSING SYSTEM
- Publication number 20240112922
- Publication date Apr 4, 2024
- TOKYO ELECTRON LIMITED
- Ryo MATSUBARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD, PLASMA PROCESSING APPARATUS, AND SUBSTRATE PROCESSI...
- Publication number 20230058079
- Publication date Feb 23, 2023
- TOKYO ELECTRON LIMITED
- Takayuki KATSUNUMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220384151
- Publication date Dec 1, 2022
- TOKYO ELECTRON LIMITED
- Yuta NAKANE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20220199371
- Publication date Jun 23, 2022
- TOKYO ELECTRON LIMITED
- Sho KUMAKURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING METHOD, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCE...
- Publication number 20210233778
- Publication date Jul 29, 2021
- TOKYO ELECTRON LIMITED
- Maju TOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD, PLASMA PROCESSING APPARATUS, AND SUBSTRATE PROCESSI...
- Publication number 20210082713
- Publication date Mar 18, 2021
- TOKYO ELECTRON LIMITED
- Takayuki KATSUNUMA
- H01 - BASIC ELECTRIC ELEMENTS

Yuta NAKANE

Person

Patents Grantslast 30 patents

Etching method, substrate processing apparatus, and substrate proce...

Substrate processing method

Etching method, plasma processing apparatus, and substrate processi...

Patents Applicationslast 30 patents

METHOD FOR CLEANING CHAMBER OR COMPONENT, SUBSTRATE PROCESSING METH...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

PLASMA PROCESSING SYSTEM, PLASMA PROCESSING APPARATUS, AND ETCHING...

ETCHING METHOD AND PLASMA PROCESSING SYSTEM

ETCHING METHOD, PLASMA PROCESSING APPARATUS, AND SUBSTRATE PROCESSI...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD

ETCHING METHOD, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCE...

ETCHING METHOD, PLASMA PROCESSING APPARATUS, AND SUBSTRATE PROCESSI...