Yuta NAKANO

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing device, substrate processing method, and subst...
- Patent number 11,195,731
- Issue date Dec 7, 2021
- SCREEN Holdings Co., Ltd.
- Masafumi Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,843,223
- Issue date Nov 24, 2020
- SCREEN Holdings Co., Ltd.
- Takayoshi Tanaka
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220375743
- Publication date Nov 24, 2022
- SCREEN Holdings Co., Ltd.
- Takaaki ISHIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SEMICONDUCTOR PRODUCTION METHOD, AND S...
- Publication number 20220148888
- Publication date May 12, 2022
- SCREEN Holdings Co., Ltd.
- Kenji KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180345315
- Publication date Dec 6, 2018
- SCREEN Holdings Co., Ltd.
- Takayoshi TANAKA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING METHOD, AND SUBST...
- Publication number 20180182649
- Publication date Jun 28, 2018
- SCREEN Holdings Co., Ltd.
- Masafumi INOUE
- H01 - BASIC ELECTRIC ELEMENTS