Yuta SEYA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of processing target object
- Patent number 10,707,088
- Issue date Jul 7, 2020
- Tokyo Electron Limited
- Shinya Morikita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for processing workpiece
- Patent number 10,692,726
- Issue date Jun 23, 2020
- Tokyo Electron Limited
- Shinya Morikita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method
- Patent number 9,779,962
- Issue date Oct 3, 2017
- Tokyo Electron Limited
- Takao Funakubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method and plasma etching apparatus
- Patent number 9,177,823
- Issue date Nov 3, 2015
- Tokyo Electron Limited
- Yuta Seya
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR PROCESSING WORKPIECE
- Publication number 20190252198
- Publication date Aug 15, 2019
- TOKYO ELECTRON LIMITED
- Shinya MORIKITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING TARGET OBJECT
- Publication number 20180047578
- Publication date Feb 15, 2018
- TOKYO ELECTRON LIMITED
- Shinya Morikita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD
- Publication number 20160163554
- Publication date Jun 9, 2016
- TOKYO ELECTRON LIMITED
- Takao FUNAKUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
- Publication number 20140134847
- Publication date May 15, 2014
- TOKYO ELECTRON LIMITED
- Yuta SEYA
- H01 - BASIC ELECTRIC ELEMENTS