Yuta SUGIMOTO

Follow

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
High frequency antenna and plasma processing device
- Patent number 10,971,334
- Issue date Apr 6, 2021
- Kabushiki Kaisha Toshiba
- Yuta Sugimoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR APPARATUS AND MANUFACTURING METHOD OF SEMICONDUCTOR A...
- Publication number 20240096702
- Publication date Mar 21, 2024
- Kabushiki Kaisha Toshiba
- Yuta SUGIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20230307516
- Publication date Sep 28, 2023
- Kabushiki Kaisha Toshiba
- Yuta SUGIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH FREQUENCY ANTENNA AND PLASMA PROCESSING DEVICE
- Publication number 20210057184
- Publication date Feb 25, 2021
- KABUSHIKI KAISHA TOSHIBA
- Yuta SUGIMOTO
- H01 - BASIC ELECTRIC ELEMENTS