Yuta Yoshimura

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 6,524,389
- Issue date Feb 25, 2003
- Tokyo Electron Limited
- Kyoshige Katayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 6,354,832
- Issue date Mar 12, 2002
- Tokyo Electron Limited
- Yuta Yoshimura
- H01 - BASIC ELECTRIC ELEMENTS