Yutai MATSUHASHI

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and image capturing method
- Patent number 12,230,523
- Issue date Feb 18, 2025
- Tokyo Electron Limited
- Tadashi Enomoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
STATUS DETERMINATION METHOD AND MONITORING DEVICE
- Publication number 20250038022
- Publication date Jan 30, 2025
- TOKYO ELECTRON LIMITED
- Huizhen BU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INFORMATION COLLECTION DEVICE
- Publication number 20240255928
- Publication date Aug 1, 2024
- TOKYO ELECTRON LIMITED
- Yutai MATSUHASHI
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND IMAGE CAPTURING METHOD
- Publication number 20230154776
- Publication date May 18, 2023
- TOKYO ELECTRON LIMITED
- Tadashi ENOMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INFORMATION PROCESSING APPARATUS, TRANSFER POSITION TEACHING METHOD...
- Publication number 20220383536
- Publication date Dec 1, 2022
- TOKYO ELECTRON LIMITED
- Tadashi ENOMOTO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TEACHING METHOD AND TRANSFER SYSTEM
- Publication number 20210398342
- Publication date Dec 23, 2021
- TOKYO ELECTRON LIMITED
- Masakazu YAMAMOTO
- G06 - COMPUTING CALCULATING COUNTING