Yutaka Amemiya

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for treating substrates
- Patent number 5,385,624
- Issue date Jan 31, 1995
- Tokyo Electron Limited
- Yutaka Amemiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of ashing layers, and apparatus for ashing layers
- Patent number 4,812,201
- Issue date Mar 14, 1989
- Tokyo Electron Limited
- Hiroyuki Sakai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY