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Hitachinaka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Pattern-measuring apparatus and semiconductor-measuring system
Patent number
10,445,875
Issue date
Oct 15, 2019
Hitachi High-Technologies Corporation
Yasutaka Toyoda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern-measuring apparatus and semiconductor-measuring system
Patent number
9,990,708
Issue date
Jun 5, 2018
Hitachi High-Technologies Corporation
Yasutaka Toyoda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Measurement method, image processing device, and charged particle b...
Patent number
9,536,170
Issue date
Jan 3, 2017
Hitachi High-Technologies Corporation
Takeyoshi Ohashi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern measurement device and pattern measurement method
Patent number
8,959,461
Issue date
Feb 17, 2015
Hitachi High-Technologies Corporation
Takuma Shibahara
G01 - MEASURING TESTING
Information
Patent Grant
Pattern measuring apparatus, and pattern measuring method and program
Patent number
8,942,464
Issue date
Jan 27, 2015
Hitachi High-Technologies Corporation
Takuma Shibahara
G01 - MEASURING TESTING
Information
Patent Grant
Electron microscope for inspecting dimension and shape of a pattern...
Patent number
8,199,191
Issue date
Jun 12, 2012
Hitachi High-Technologies Corporation
Hidetoshi Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle system
Patent number
7,772,554
Issue date
Aug 10, 2010
Hitachi High-Technologies Corporation
Akiyuki Sugiyama
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Pattern-Measuring Apparatus and Semiconductor-Measuring System
Publication number
20180247400
Publication date
Aug 30, 2018
Hitachi High-Technologies Corporation
Yasutaka TOYODA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Pattern-Measuring Apparatus and Semiconductor-Measuring System
Publication number
20160005157
Publication date
Jan 7, 2016
Hitachi High-Technologies Corporation
Yasutaka TOYODA
G01 - MEASURING TESTING
Information
Patent Application
PATTERN EVALUATION DEVICE AND PATTERN EVALUATION METHOD
Publication number
20150146967
Publication date
May 28, 2015
Hitachi High-Technologies Corporation
Atsushi Miyamoto
G02 - OPTICS
Information
Patent Application
MEASUREMENT METHOD, IMAGE PROCESSING DEVICE, AND CHARGED PARTICLE B...
Publication number
20150110406
Publication date
Apr 23, 2015
Takeyoshi Ohashi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PATTERN MEASUREMENT DEVICE AND PATTERN MEASUREMENT METHOD
Publication number
20140224986
Publication date
Aug 14, 2014
Takuma Shibahara
G01 - MEASURING TESTING
Information
Patent Application
PATTERN MEASURING APPARATUS, AND PATTERN MEASURING METHOD AND PROGRAM
Publication number
20130223723
Publication date
Aug 29, 2013
Hitachi High-Technologies Corporation
Takuma Shibahara
G01 - MEASURING TESTING
Information
Patent Application
Charged Particle System
Publication number
20080245965
Publication date
Oct 9, 2008
Hitachi High-Technologies Corporation
Akiyuki Sugiyama
B82 - NANO-TECHNOLOGY
Information
Patent Application
Electron microscope
Publication number
20080024601
Publication date
Jan 31, 2008
Hidetoshi Sato
H01 - BASIC ELECTRIC ELEMENTS