Yutaka Kakehi

Person

Kudamatsu, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for treating samples
- Patent number 6,329,298
- Issue date Dec 11, 2001
- Hitachi, Ltd.
- Ryooji Fukuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of treating samples
- Patent number 5,770,100
- Issue date Jun 23, 1998
- Ryooji Fukuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma generator with mode restricting means
- Patent number 5,646,489
- Issue date Jul 8, 1997
- Hitachi, Ltd.
- Yutaka Kakehi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of treating samples
- Patent number 5,556,714
- Issue date Sep 17, 1996
- Hitachi, Ltd.
- Ryooji Fukuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for generating plasma, and semiconductor proc...
- Patent number 5,433,789
- Issue date Jul 18, 1995
- Hitachi, Ltd.
- Yutaka Kakehi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of treating samples
- Patent number 5,380,397
- Issue date Jan 10, 1995
- Hitachi, Ltd.
- Ryooji Fukuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave plasma generating method and apparatus
- Patent number 5,276,386
- Issue date Jan 4, 1994
- Hitachi, Ltd.
- Seiichi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma processing method and apparatus
- Patent number 4,971,651
- Issue date Nov 20, 1990
- Hitachi, Ltd.
- Seiichi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma treating method and apparatus therefor
- Patent number 4,943,361
- Issue date Jul 24, 1990
- Hitachi, Ltd.
- Yutaka Kakehi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing unit and apparatus
- Patent number 4,824,309
- Issue date Apr 25, 1989
- Hitachi, Ltd.
- Yutaka Kakehi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treating method and apparatus therefor
- Patent number 4,795,529
- Issue date Jan 3, 1989
- Hitachi, Ltd.
- Yoshinao Kawasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sample chucking apparatus
- Patent number 4,718,681
- Issue date Jan 12, 1988
- Hitachi, Ltd.
- Yutaka Kakehi
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Semiconductor substrate transport system
- Patent number 4,664,578
- Issue date May 12, 1987
- Hitachi, Ltd.
- Yutaka Kakehi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processor
- Patent number 4,631,106
- Issue date Dec 23, 1986
- Hitachi, Ltd.
- Norio Nakazato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling sample temperature
- Patent number 4,565,601
- Issue date Jan 21, 1986
- Hitachi, Ltd.
- Yutaka Kakehi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vehicle tilt control apparatus
- Patent number 4,440,093
- Issue date Apr 3, 1984
- Hitachi, Ltd.
- Yutaka Kakehi
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Vehicle body vibration control apparatus
- Patent number 4,402,527
- Issue date Sep 6, 1983
- Hitachi, Ltd.
- Yutaka Kakehi
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Earthquake resistant crane
- Patent number 4,382,413
- Issue date May 10, 1983
- Hitachi, Ltd.
- Yutaka Kakehi
- B66 - HOISTING LIFTING HAULING

Yutaka Kakehi

Person

Patents Grantslast 30 patents

Apparatus for treating samples

Method of treating samples

Plasma generator with mode restricting means

Method of treating samples

Methods and apparatus for generating plasma, and semiconductor proc...

Method of treating samples

Microwave plasma generating method and apparatus

Microwave plasma processing method and apparatus

Plasma treating method and apparatus therefor

Vacuum processing unit and apparatus

Plasma treating method and apparatus therefor

Sample chucking apparatus

Semiconductor substrate transport system

Plasma processor

Method and apparatus for controlling sample temperature

Vehicle tilt control apparatus

Vehicle body vibration control apparatus

Earthquake resistant crane