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Yutaka Kitagawara
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Annaka, JP
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last 30 patents
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Patent Grant
Method for evaluating oxygen concentrating in semiconductor silicon...
Patent number
5,841,532
Issue date
Nov 24, 1998
Shin-Etsu Handotai Co., Ltd.
Tomosuke Yoshida
G01 - MEASURING TESTING
Information
Patent Grant
Method of evaluating lifetime related quality of semiconductor surface
Patent number
5,612,539
Issue date
Mar 18, 1997
Shin-Etsu Handotai Co., Ltd.
Ryoji Hoshi
G01 - MEASURING TESTING
Information
Patent Grant
Method of evaluating silicon wafers
Patent number
5,533,387
Issue date
Jul 9, 1996
Shin-Etsu Handotai Co., Ltd.
Ken Aihara
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Determining carbon concentration in silicon single crystal by FT-IR
Patent number
5,444,246
Issue date
Aug 22, 1995
Shin-Etsu Handotai Co., Ltd.
Yutaka Kitagawara
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for determination of interstitial oxygen conce...
Patent number
5,386,118
Issue date
Jan 31, 1995
Shin-Etsu Handotai Co., Ltd.
Yutaka Kitagawara
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method for evaluation of spatial distribution of deep level concent...
Patent number
5,302,832
Issue date
Apr 12, 1994
Shin-Etsu Handotai Co., Ltd.
Yutaka Kitagawara
G01 - MEASURING TESTING
Information
Patent Grant
Method for heat-treating gallium arsenide monocrystals
Patent number
5,228,927
Issue date
Jul 20, 1993
Shin-Etsu Handotai Company Limited
Yutaka Kitagawara
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method for heat-treating gallium arsenide monocrystals
Patent number
5,209,811
Issue date
May 11, 1993
Shin-Etsu Handotai Company Limited of Japan
Yutaka Kitagawara
C30 - CRYSTAL GROWTH