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Yutaka Kitagawara
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Fukushima, JP
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last 30 patents
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Patent Grant
Evaluation method for crystal defect in silicon single crystal wafer
Patent number
7,718,446
Issue date
May 18, 2010
Shin-Etsu Handotai Co., Ltd.
Hisayuki Saito
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Evaluation Method for Crystal Defect in Silicon Single Crystal Wafer
Publication number
20080153186
Publication date
Jun 26, 2008
Hisayuki Saito
G01 - MEASURING TESTING