Yutaka Kokaze

Person

Susono-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for operating substrate processing apparatus
- Patent number 9,305,752
- Issue date Apr 5, 2016
- Ulvac, Inc.
- Yutaka Kokaze
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry cleaning method for plasma processing apparatus
- Patent number 8,133,325
- Issue date Mar 13, 2012
- Ulvac, Inc.
- Masahisa Ueda
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20180204729
- Publication date Jul 19, 2018
- Ulvac, Inc.
- Kazuhiro SONODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film Forming Apparatus and Film Forming Method
- Publication number 20170004995
- Publication date Jan 5, 2017
- Ulvac, Inc.
- Keiichiro Asakawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING DIELECTRIC DEVICE AND ASHING METHOD
- Publication number 20130284701
- Publication date Oct 31, 2013
- Ulvac, Inc.
- Yoshiaki Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING SUBSTRATE PROCESSING APPARATUS
- Publication number 20120193323
- Publication date Aug 2, 2012
- ULVAC, Inc.
- Yutaka KOKAZE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT
- Publication number 20120152889
- Publication date Jun 21, 2012
- Ulvac Inc.
- Masahisa Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20100213170
- Publication date Aug 26, 2010
- ULVAC, Inc.
- Yutaka Kokaze
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND MANUFACTURING METHOD OF DEPOSITION-...
- Publication number 20100151150
- Publication date Jun 17, 2010
- ULVAC, Inc.
- Yutaka Kokaze
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRY CLEANING METHOD FOR PLASMA PROCESSING APPARATUS
- Publication number 20100083981
- Publication date Apr 8, 2010
- ULVAC, Inc.
- Masahisa Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR MANUFACTURING DEVICE
- Publication number 20090275146
- Publication date Nov 5, 2009
- ULVAC, Inc.
- Katsuo TAKANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Capacitance element manufacturing method and etching method
- Publication number 20080026539
- Publication date Jan 31, 2008
- ULVAC, Inc.
- Yutaka Kokaze
- H01 - BASIC ELECTRIC ELEMENTS

Yutaka Kokaze

Person

Patents Grantslast 30 patents

Method for operating substrate processing apparatus

Dry cleaning method for plasma processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

Film Forming Apparatus and Film Forming Method

METHOD OF MANUFACTURING DIELECTRIC DEVICE AND ASHING METHOD

METHOD FOR OPERATING SUBSTRATE PROCESSING APPARATUS

METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT

ETCHING METHOD AND ETCHING APPARATUS

PLASMA PROCESSING APPARATUS AND MANUFACTURING METHOD OF DEPOSITION-...

DRY CLEANING METHOD FOR PLASMA PROCESSING APPARATUS

METHOD AND APPARATUS FOR MANUFACTURING DEVICE

Capacitance element manufacturing method and etching method