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Yutaka Kudou

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  • Kudamatsu-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Etching method and etching equipment
    • Patent number 8,288,287
    • Issue date Oct 16, 2012
    • Hitachi High-Technologies Corporation
    • Kazuo Takata
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing method
    • Patent number 8,277,563
    • Issue date Oct 2, 2012
    • Hitachi High-Technologies Corporation
    • Masunori Ishihara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing method
    • Patent number 7,909,933
    • Issue date Mar 22, 2011
    • Hitachi High-Technologies Corporation
    • Masunori Ishihara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method for etching and apparatus for etching
    • Patent number 7,642,194
    • Issue date Jan 5, 2010
    • Denso Corporation
    • Yuji Kato
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA ASHING APPARATUS
    • Publication number 20130019894
    • Publication date Jan 24, 2013
    • Hitachi Kokusai Electric Inc.
    • Yutaka KUDOU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM PROCESSING APPARATUS AND VACUUM PROCESSING METHOD
    • Publication number 20120093617
    • Publication date Apr 19, 2012
    • Hitachi High-Technologies Corporation
    • Yutaka Kudou
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM PROCESSING SYSTEM
    • Publication number 20120067521
    • Publication date Mar 22, 2012
    • Hitachi High-Technologies Corporation
    • Takahiro SHIMOMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM PROCESSING APPARATUS
    • Publication number 20120067522
    • Publication date Mar 22, 2012
    • Hitachi High-Technologies Corporation
    • Takahiro SHIMOMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD
    • Publication number 20110120495
    • Publication date May 26, 2011
    • Masunori Ishihara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD
    • Publication number 20090214401
    • Publication date Aug 27, 2009
    • Masunori Ishihara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma Processing Method
    • Publication number 20080216865
    • Publication date Sep 11, 2008
    • Masunori Ishihara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD AND ETCHING EQUIPMENT
    • Publication number 20080176409
    • Publication date Jul 24, 2008
    • Kazuo Takata
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Etching method and etching equipment
    • Publication number 20070080136
    • Publication date Apr 12, 2007
    • Kazuo Takata
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method for etching and apparatus for etching
    • Publication number 20070048954
    • Publication date Mar 1, 2007
    • DENSO CORPORATION
    • Yuji Kato
    • H01 - BASIC ELECTRIC ELEMENTS