Yutaka MATSUI

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Gas temperature measurement method and gas introduction system
- Patent number 10,090,178
- Issue date Oct 2, 2018
- Tokyo Electron Limited
- Hidetoshi Kimura
- G01 - MEASURING TESTING
Information Patent Grant
Plasma processing apparatus, plasma processing method, and storage...
- Patent number 9,362,090
- Issue date Jun 7, 2016
- Tokyo Electron Limited
- Masanobu Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method and apparatus
- Patent number 8,173,036
- Issue date May 8, 2012
- Tokyo Electron Limited
- Masanobu Honda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus, plasma processing method, and storage...
- Patent number 8,141,514
- Issue date Mar 27, 2012
- Tokyo Electron Limited
- Masanobu Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning substrate processing chamber, storage medium, an...
- Patent number 8,057,603
- Issue date Nov 15, 2011
- Tokyo Electron Limited
- Masanobu Honda
- B08 - CLEANING
Information Patent Grant
Structure for plasma processing chamber, plasma processing chamber,...
- Patent number 7,895,970
- Issue date Mar 1, 2011
- Tokyo Electron Limited
- Masanobu Honda
- F02 - COMBUSTION ENGINES HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
Information Patent Grant
Plasma processing method
- Patent number 7,883,632
- Issue date Feb 8, 2011
- Tokyo Electron Limited
- Masanobu Honda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GAS TEMPERATURE MEASUREMENT METHOD AND GAS INTRODUCTION SYSTEM
- Publication number 20170148653
- Publication date May 25, 2017
- TOKYO ELECTRON LIMITED
- Hidetoshi KIMURA
- G01 - MEASURING TESTING
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND STORAGE...
- Publication number 20110088850
- Publication date Apr 21, 2011
- TOKYO ELECTRON LIMITED
- Masanobu HONDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrode plate for use in plasma processing and plasma processing...
- Publication number 20070256638
- Publication date Nov 8, 2007
- Masanobu Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20070221332
- Publication date Sep 27, 2007
- TOKYO ELECTRON LIMITED
- Masanobu HONDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND STORAGE...
- Publication number 20070221493
- Publication date Sep 27, 2007
- TOKYO ELECTRON LIMITED
- Masanobu HONDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND STORAGE...
- Publication number 20070224817
- Publication date Sep 27, 2007
- TOKYO ELECTRON LIMITED
- Masanobu HONDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CLEANING SUBSTRATE PROCESSING CHAMBER, STORAGE MEDIUM, AN...
- Publication number 20070186952
- Publication date Aug 16, 2007
- TOKYO ELECTRON LIMITED
- Masanobu HONDA
- B08 - CLEANING
Information Patent Application
Structure for plasma processing chamber, plasma processing chamber,...
- Publication number 20070068798
- Publication date Mar 29, 2007
- TOKYO ELECTRON LIMITED
- Masanobu Honda
- F02 - COMBUSTION ENGINES HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
Information Patent Application
Plasma processing method and apparatus
- Publication number 20060196847
- Publication date Sep 7, 2006
- TOKYO ELECTRON LIMITED
- Masanobu Honda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yutaka MATSUI

Person

Patents Grantslast 30 patents

Gas temperature measurement method and gas introduction system

Plasma processing apparatus, plasma processing method, and storage...

Plasma processing method and apparatus

Plasma processing apparatus, plasma processing method, and storage...

Method of cleaning substrate processing chamber, storage medium, an...

Structure for plasma processing chamber, plasma processing chamber,...

Plasma processing method

Patents Applicationslast 30 patents

GAS TEMPERATURE MEASUREMENT METHOD AND GAS INTRODUCTION SYSTEM

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND STORAGE...

Electrode plate for use in plasma processing and plasma processing...

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND STORAGE...

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND STORAGE...

METHOD OF CLEANING SUBSTRATE PROCESSING CHAMBER, STORAGE MEDIUM, AN...

Structure for plasma processing chamber, plasma processing chamber,...

Plasma processing method and apparatus