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Yutaka Miura
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Yamanashi-ken, JP
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last 30 patents
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Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
6,110,287
Issue date
Aug 29, 2000
Tokyo Electron Limited
Izumi Arai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processing apparatus for substrates to be processed
Patent number
5,704,981
Issue date
Jan 6, 1998
Tokyo Electron Ltd.
Shunji Kawakami
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma etching system and plasma etching method
Patent number
5,593,540
Issue date
Jan 14, 1997
Hitachi, Ltd.
Kazushi Tomita
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Plasma etching system
Patent number
5,423,936
Issue date
Jun 13, 1995
Hitachi, Ltd.
Kazushi Tomita
H01 - BASIC ELECTRIC ELEMENTS