Yutaka Omoto

Person

Kudamatsu, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck and processing apparatus
- Patent number 11,955,360
- Issue date Apr 9, 2024
- Tocalo Co., Ltd.
- Takeshi Takabatake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 9,343,336
- Issue date May 17, 2016
- Hitachi High-Technologies Corporation
- Kohei Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 8,920,665
- Issue date Dec 30, 2014
- Hitachi High-Technologies Corporation
- Kohei Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing equipment and plasma processing method using the...
- Patent number 6,624,084
- Issue date Sep 23, 2003
- Hitachi, Ltd.
- Kenji Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for plasma processing
- Patent number 6,156,663
- Issue date Dec 5, 2000
- Hitachi, Ltd.
- Katsuya Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treating method and apparatus therefor
- Patent number 4,943,361
- Issue date Jul 24, 1990
- Hitachi, Ltd.
- Yutaka Kakehi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processor
- Patent number 4,631,106
- Issue date Dec 23, 1986
- Hitachi, Ltd.
- Norio Nakazato
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK AND PROCESSING APPARATUS
- Publication number 20230154780
- Publication date May 18, 2023
- TOCALO CO., LTD.
- Takeshi TAKABATAKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20150083329
- Publication date Mar 26, 2015
- Hitachi High-Technologies Corporation
- Kohei Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20140001154
- Publication date Jan 2, 2014
- Hitachi High-Technologies Corporation
- Kohei Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing Apparatus
- Publication number 20120000774
- Publication date Jan 5, 2012
- Ken Yoshioka
- G05 - CONTROLLING REGULATING
Information Patent Application
Plasma Processing Apparatus and Plasma Processing Method
- Publication number 20090321017
- Publication date Dec 31, 2009
- Tsunehiko Tsubone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20080170969
- Publication date Jul 17, 2008
- Ken Yoshioka
- G05 - CONTROLLING REGULATING
Information Patent Application
Sample holding electrode and a plasma processing apparatus using th...
- Publication number 20070209933
- Publication date Sep 13, 2007
- Ken Yoshioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus with resonance countermeasure function
- Publication number 20070181254
- Publication date Aug 9, 2007
- Hitachi High-Technologies Corporation
- Tsutomu Iida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing equipment and plasma processing method using the...
- Publication number 20010022293
- Publication date Sep 20, 2001
- Kenji Maeda
- H01 - BASIC ELECTRIC ELEMENTS

Yutaka Omoto

Person

Patents Grantslast 30 patents

Electrostatic chuck and processing apparatus

Plasma processing apparatus and plasma processing method

Plasma processing apparatus and plasma processing method

Plasma processing equipment and plasma processing method using the...

Method and apparatus for plasma processing

Plasma treating method and apparatus therefor

Plasma processor

Patents Applicationslast 30 patents

ELECTROSTATIC CHUCK AND PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

Plasma Processing Apparatus

Plasma Processing Apparatus and Plasma Processing Method

PLASMA PROCESSING APPARATUS

Sample holding electrode and a plasma processing apparatus using th...

Plasma processing apparatus with resonance countermeasure function

Plasma processing equipment and plasma processing method using the...