Yutaka Osada

Person

  • Kurokawa-gun, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Seasoning method and etching method

    • Patent number 10,950,452
    • Issue date Mar 16, 2021
    • Tokyo Electron Limited
    • Yoshio Ishikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma etching method

    • Patent number 9,412,607
    • Issue date Aug 9, 2016
    • Tokyo Electron Limited
    • Tomiko Kamada
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    SEASONING METHOD AND ETCHING METHOD

    • Publication number 20170062227
    • Publication date Mar 2, 2017
    • TOKYO ELECTRON LIMITED
    • Yoshio Ishikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING METHOD

    • Publication number 20140332372
    • Publication date Nov 13, 2014
    • TOKYO ELECTRON LIMITED
    • Tomiko Kamada
    • H01 - BASIC ELECTRIC ELEMENTS