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Yutaka Shiga
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Annaka, JP
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Patents Grants
last 30 patents
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Patent Grant
Silicon epitaxial wafer and method for manufacturing the same
Patent number
8,729,676
Issue date
May 20, 2014
Shin-Etsu Handotai Co., Ltd.
Yutaka Shiga
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
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Patent Application
METHOD FOR EVALUATING CRYSTAL DEFECTS IN SILICON CARBIDE SINGLE CRY...
Publication number
20240142390
Publication date
May 2, 2024
Shin-Etsu Handotai Co., Ltd.
Yutaka SHIGA
C30 - CRYSTAL GROWTH
Information
Patent Application
SILICON EPITAXIAL WAFER AND METHOD FOR MANUFACTURING THE SAME
Publication number
20130037920
Publication date
Feb 14, 2013
Shin-Etsu Handotai Co., Ltd.
Yutaka Shiga
C30 - CRYSTAL GROWTH