Yutaka Shimada

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Sagamihara, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus etching tunnel-type
- Patent number 5,383,984
- Issue date Jan 24, 1995
- Tokyo Electron Limited
- Yutaka Shimada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 4,970,435
- Issue date Nov 13, 1990
- Tel Sagami Limited
- Susumu Tanaka
- H01 - BASIC ELECTRIC ELEMENTS