 
                 Minatu-ku, JP
 Minatu-ku, JP
                     Entegris, Inc.
                                    Entegris, Inc.
                                 Fumio  Nozaki
                                    Fumio  Nozaki
                                 C01 - INORGANIC CHEMISTRY
                                    C01 - INORGANIC CHEMISTRY
                                 Entegris, Inc.
                                    Entegris, Inc.
                                 Yutaka  Shimada
                                    Yutaka  Shimada
                                 Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                    Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
                                 Entegris, Inc.
                                    Entegris, Inc.
                                 Fumio  Nozaki
                                    Fumio  Nozaki
                                 B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
                                    B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
                                 Entegris, Inc.
                                    Entegris, Inc.
                                 Yutaka  Shimada
                                    Yutaka  Shimada
                                 B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
                                    B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL