Yutaka SHIRAISHI

Person

Oyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Target substance replenishment device, extreme ultraviolet light ge...
- Patent number 12,150,233
- Issue date Nov 19, 2024
- Gigaphoton Inc.
- Yutaka Shiraishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet light generation apparatus and electronic devic...
- Patent number 11,474,433
- Issue date Oct 18, 2022
- Gigaphoton Inc.
- Yuki Takeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Target supply device, extreme ultraviolet light generation apparatu...
- Patent number 11,363,706
- Issue date Jun 14, 2022
- Gigaphoton Inc.
- Yutaka Shiraishi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device, extreme ultraviolet light generating apparatu...
- Patent number 11,360,391
- Issue date Jun 14, 2022
- Gigaphoton Inc.
- Fumio Iwamoto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device, target supply method, and electronic device m...
- Patent number 11,320,740
- Issue date May 3, 2022
- Gigaphoton Inc.
- Tsukasa Hori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Target supply device, target supply method, and electronic device m...
- Patent number 11,310,899
- Issue date Apr 19, 2022
- Gigaphoton Inc.
- Yutaka Shiraishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet light generation device and target supply device
- Patent number 10,955,760
- Issue date Mar 23, 2021
- Gigaphoton Inc.
- Masaki Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Target supply device, target material refining method, recording me...
- Patent number 10,629,414
- Issue date Apr 21, 2020
- Gigaphoton Inc.
- Fumio Iwamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 10,524,343
- Issue date Dec 31, 2019
- Gigaphoton Inc.
- Takanobu Ishihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Target generation device and extreme ultraviolet light generation d...
- Patent number 10,372,041
- Issue date Aug 6, 2019
- Gigaphoton Inc.
- Yutaka Shiraishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Target storage device
- Patent number 10,349,508
- Issue date Jul 9, 2019
- Gigaphoton Inc.
- Yutaka Shiraishi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device, processing device and processing method therefor
- Patent number 10,237,961
- Issue date Mar 19, 2019
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device and extreme ultraviolet light generating device
- Patent number 10,225,917
- Issue date Mar 5, 2019
- Gigaphoton Inc.
- Takahisa Fujimaki
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Filter and target supply apparatus
- Patent number 10,143,074
- Issue date Nov 27, 2018
- Gigaphoton Inc.
- Tomohide Ichinose
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Target supply device, processing device and processing method thefefor
- Patent number 10,136,509
- Issue date Nov 20, 2018
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device and EUV light generation apparatus
- Patent number 10,073,353
- Issue date Sep 11, 2018
- Gigaphoton Inc.
- Yutaka Shiraishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber device, target generation method, and extreme ultraviolet l...
- Patent number 10,028,365
- Issue date Jul 17, 2018
- Gigaphoton Inc.
- Takanobu Ishihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 9,894,744
- Issue date Feb 13, 2018
- Gigaphoton Inc.
- Fumio Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Target supply device
- Patent number 9,648,715
- Issue date May 9, 2017
- Gigaphoton Inc.
- Yutaka Shiraishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Target material refinement device and target supply apparatus
- Patent number 9,039,957
- Issue date May 26, 2015
- Gigaphoton Inc.
- Yutaka Shiraishi
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Chamber apparatus
- Patent number 8,748,853
- Issue date Jun 10, 2014
- Gigaphoton Inc.
- Shinji Nagai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
TARGET SUPPLY SYSTEM, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATU...
- Publication number 20230284364
- Publication date Sep 7, 2023
- Gigaphoton Inc.
- Nozomu OUE
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
EUV LIGHT GENERATION APPARATUS, ELECTRONIC DEVICE MANUFACTURING MET...
- Publication number 20230142875
- Publication date May 11, 2023
- Gigaphoton Inc.
- Fumio IWAMOTO
- G01 - MEASURING TESTING
Information Patent Application
TARGET SUBSTANCE REPLENISHMENT DEVICE, EXTREME ULTRAVIOLET LIGHT GE...
- Publication number 20230008733
- Publication date Jan 12, 2023
- Gigaphoton Inc.
- Yutaka SHIRAISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATU...
- Publication number 20220015218
- Publication date Jan 13, 2022
- Gigaphoton Inc.
- Yutaka SHIRAISHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY DEVICE, TARGET SUPPLY METHOD, AND ELECTRONIC DEVICE M...
- Publication number 20210410261
- Publication date Dec 30, 2021
- Gigaphoton Inc.
- Yutaka SHIRAISHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TARGET SUPPLY DEVICE, TARGET SUPPLY METHOD, AND ELECTRONIC DEVICE M...
- Publication number 20210364927
- Publication date Nov 25, 2021
- Gigaphoton Inc.
- Tsukasa HORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATING APPARATU...
- Publication number 20200341383
- Publication date Oct 29, 2020
- Gigaphoton Inc.
- Fumio IWAMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
- Publication number 20200233309
- Publication date Jul 23, 2020
- Gigaphoton Inc.
- Yuki TAKEDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE AND TARGET SUPPLY DEVICE
- Publication number 20200209765
- Publication date Jul 2, 2020
- Gigaphoton Inc.
- Masaki Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20190289705
- Publication date Sep 19, 2019
- Gigaphoton Inc.
- Takanobu ISHIHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TARGET SUPPLY DEVICE, TARGET MATERIAL REFINING METHOD, RECORDING ME...
- Publication number 20190237303
- Publication date Aug 1, 2019
- Gigaphoton Inc.
- Fumio IWAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET GENERATION DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION D...
- Publication number 20190155163
- Publication date May 23, 2019
- Gigaphoton Inc.
- Yutaka SHIRAISHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TARGET SUPPLY DEVICE, PROCESSING DEVICE AND PROCESSING METHOD THEREFOR
- Publication number 20190045614
- Publication date Feb 7, 2019
- Gigaphoton Inc.
- Tsukasa HORI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY DEVICE AND EUV LIGHT GENERATION APPARATUS
- Publication number 20180341180
- Publication date Nov 29, 2018
- Gigaphoton Inc.
- Yutaka SHIRAISHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE
- Publication number 20180288863
- Publication date Oct 4, 2018
- Gigaphoton Inc.
- Takahisa FUJIMAKI
- G05 - CONTROLLING REGULATING
Information Patent Application
TARGET STORAGE DEVICE
- Publication number 20180160518
- Publication date Jun 7, 2018
- Gigaphoton Inc.
- Yutaka SHIRAISHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CHAMBER DEVICE, TARGET GENERATION METHOD, AND EXTREME ULTRAVIOLET L...
- Publication number 20180007770
- Publication date Jan 4, 2018
- Gigaphoton Inc.
- Takanobu ISHIHARA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY DEVICE, PROCESSING DEVICE AND PROCESSING METHOD THEFEFOR
- Publication number 20170280543
- Publication date Sep 28, 2017
- Gigaphoton Inc.
- Tsukasa HORI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY DEVICE, TARGET MATERIAL REFINING METHOD, RECORDING ME...
- Publication number 20170053780
- Publication date Feb 23, 2017
- Gigaphoton Inc.
- Fumio IWAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET SUPPLY DEVICE AND EUV LIGHT GENERATION APPARATUS
- Publication number 20160377986
- Publication date Dec 29, 2016
- Gigaphoton Inc.
- Yutaka SHIRAISHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TARGET SUPPLY DEVICE
- Publication number 20160249443
- Publication date Aug 25, 2016
- GIGAPHOTON INC.
- Yutaka SHIRAISHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
FILTER AND TARGET SUPPLY APPARATUS
- Publication number 20160227637
- Publication date Aug 4, 2016
- Gigaphoton Inc.
- Tomohide ICHINOSE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20160192470
- Publication date Jun 30, 2016
- GIGAPHOTON INC.
- Fumio IWAMOTO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION APPAR...
- Publication number 20150144809
- Publication date May 28, 2015
- Gigaphoton Inc.
- Shinji OKAZAKI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET MATERIAL REFINEMENT DEVICE AND TARGET SUPPLY APPARATUS
- Publication number 20130221587
- Publication date Aug 29, 2013
- GIGAPHOTON INC.
- Yutaka SHIRAISHI
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
CHAMBER APPARATUS
- Publication number 20120248343
- Publication date Oct 4, 2012
- GIGAPHOTON INC.
- Shinji NAGAI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Yutaka SHIRAISHI

Person

Patents Grantslast 30 patents

Target substance replenishment device, extreme ultraviolet light ge...

Extreme ultraviolet light generation apparatus and electronic devic...

Target supply device, extreme ultraviolet light generation apparatu...

Target supply device, extreme ultraviolet light generating apparatu...

Target supply device, target supply method, and electronic device m...

Target supply device, target supply method, and electronic device m...

Extreme ultraviolet light generation device and target supply device

Target supply device, target material refining method, recording me...

Extreme ultraviolet light generation apparatus

Target generation device and extreme ultraviolet light generation d...

Target storage device

Target supply device, processing device and processing method therefor

Target supply device and extreme ultraviolet light generating device

Filter and target supply apparatus

Target supply device, processing device and processing method thefefor

Target supply device and EUV light generation apparatus

Chamber device, target generation method, and extreme ultraviolet l...

Extreme ultraviolet light generation apparatus

Target supply device

Target material refinement device and target supply apparatus

Chamber apparatus

Patents Applicationslast 30 patents

TARGET SUPPLY SYSTEM, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATU...

EUV LIGHT GENERATION APPARATUS, ELECTRONIC DEVICE MANUFACTURING MET...

TARGET SUBSTANCE REPLENISHMENT DEVICE, EXTREME ULTRAVIOLET LIGHT GE...

TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATU...

TARGET SUPPLY DEVICE, TARGET SUPPLY METHOD, AND ELECTRONIC DEVICE M...

TARGET SUPPLY DEVICE, TARGET SUPPLY METHOD, AND ELECTRONIC DEVICE M...

TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATING APPARATU...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...

EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE AND TARGET SUPPLY DEVICE

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

TARGET SUPPLY DEVICE, TARGET MATERIAL REFINING METHOD, RECORDING ME...

TARGET GENERATION DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION D...

TARGET SUPPLY DEVICE, PROCESSING DEVICE AND PROCESSING METHOD THEREFOR

TARGET SUPPLY DEVICE AND EUV LIGHT GENERATION APPARATUS

TARGET SUPPLY DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE

TARGET STORAGE DEVICE

CHAMBER DEVICE, TARGET GENERATION METHOD, AND EXTREME ULTRAVIOLET L...

TARGET SUPPLY DEVICE, PROCESSING DEVICE AND PROCESSING METHOD THEFEFOR

TARGET SUPPLY DEVICE, TARGET MATERIAL REFINING METHOD, RECORDING ME...

TARGET SUPPLY DEVICE AND EUV LIGHT GENERATION APPARATUS

TARGET SUPPLY DEVICE

FILTER AND TARGET SUPPLY APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

TARGET SUPPLY DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION APPAR...

TARGET MATERIAL REFINEMENT DEVICE AND TARGET SUPPLY APPARATUS

CHAMBER APPARATUS