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Yutaka Tanaka
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San Jose, CA, US
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last 30 patents
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Patent Grant
Plasma abatement of compounds containing heavy atoms
Patent number
9,649,592
Issue date
May 16, 2017
Applied Materials, Inc.
Michael S. Cox
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Patents Applications
last 30 patents
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Patent Application
PLASMA ABATEMENT OF COMPOUNDS CONTAINING HEAVY ATOMS
Publication number
20190022577
Publication date
Jan 24, 2019
Applied Materials, Inc.
Michael S. COX
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ABATEMENT OF COMPOUNDS CONTAINING HEAVY ATOMS
Publication number
20170216767
Publication date
Aug 3, 2017
Applied Materials, Inc.
Michael S. COX
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
PLASMA ABATEMENT OF COMPOUNDS CONTAINING HEAVY ATOMS
Publication number
20150251133
Publication date
Sep 10, 2015
Applied Materials, Inc.
Michael S. COX
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL