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Yutaka Tandai
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Hitachinaka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Charged particle beam device
Patent number
10,304,654
Issue date
May 28, 2019
Hitachi High-Technologies Corporation
Akira Ikegami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Defect image classification apparatus
Patent number
10,074,511
Issue date
Sep 11, 2018
Hitachi High-Technologies Corporation
Takehiro Hirai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor defect categorization device and program for semicond...
Patent number
9,881,365
Issue date
Jan 30, 2018
Hitachi High-Technologies Corporation
Yutaka Tandai
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Defect image processing apparatus, defect image processing method,...
Patent number
8,995,748
Issue date
Mar 31, 2015
Hitachi High-Technologies Corporation
Tsunehiro Sakai
G01 - MEASURING TESTING
Information
Patent Grant
Semiconductor defect classifying method, semiconductor defect class...
Patent number
8,595,666
Issue date
Nov 26, 2013
Hitachi High-Technologies Corporation
Koichi Hayakawa
G01 - MEASURING TESTING
Information
Patent Grant
Evaluation object pattern determining apparatus, evaluation object...
Patent number
8,139,845
Issue date
Mar 20, 2012
Hitachi High-Technologies Corporation
Takashi Noguchi
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
Charged Particle Beam Device
Publication number
20180233320
Publication date
Aug 16, 2018
Hitachi High-Technologies Corporation
Akira IKEGAMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Defect Image Classification Apparatus
Publication number
20160358746
Publication date
Dec 8, 2016
Hitachi High-Technologies Corporation
Takehiro HIRAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RECIPE GENERATION APPARATUS, INSPECTION SUPPORT APPARATUS, INSPECTI...
Publication number
20140177940
Publication date
Jun 26, 2014
Hitachi High-Technologies Corporation
Ryo Nakagaki
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DEFECT IMAGE PROCESSING APPARATUS, DEFECT IMAGE PROCESSING METHOD,...
Publication number
20120141011
Publication date
Jun 7, 2012
Hitachi High-Technologies Corporation
Tsunehiro Sakai
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SEMICONDUCTOR DEFECT CLASSIFYING METHOD, SEMICONDUCTOR DEFECT CLASS...
Publication number
20120131529
Publication date
May 24, 2012
Hitachi High-Technologies Corporation
Koichi Hayakawa
G01 - MEASURING TESTING
Information
Patent Application
SEMICONDUCTOR DEFECT INTEGRATED PROJECTION METHOD AND DEFECT INSPEC...
Publication number
20110296362
Publication date
Dec 1, 2011
Tamao Ishikawa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
EVALUATION OBJECT PATTERN DETERMINING APPARATUS, EVALUATION OBJECT...
Publication number
20090110262
Publication date
Apr 30, 2009
Takashi Noguchi
G06 - COMPUTING CALCULATING COUNTING