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Yutaka Uda
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Tokyo, JP
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last 30 patents
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Patent Grant
Polishing apparatus, semiconductor device manufacturing method usin...
Patent number
6,857,950
Issue date
Feb 22, 2005
Nikon Corporation
Yutaka Hayashi
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
Wafer polishing control system for chemical mechanical planarizatio...
Publication number
20050221736
Publication date
Oct 6, 2005
Nikon Corporation
Yi-Ping Hsin
B24 - GRINDING POLISHING
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Patent Application
Polishing apparatus, semiconductor device manufacturing method usin...
Publication number
20020033230
Publication date
Mar 21, 2002
NIKON CORPORATION
Yutaka Hayashi
B24 - GRINDING POLISHING