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Yutaka Unno

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Patents Grantslast 30 patents

  • Information Patent Grant

    Wafer support table and RF rod
    • Patent number 12,170,190
    • Issue date Dec 17, 2024
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Multi-zone heater
    • Patent number 11,956,863
    • Issue date Apr 9, 2024
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic-chuck heater
    • Patent number 11,688,590
    • Issue date Jun 27, 2023
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Electrostatic-chuck heater
    • Patent number 11,664,203
    • Issue date May 30, 2023
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer placement table and method for manufacturing the same
    • Patent number 11,602,012
    • Issue date Mar 7, 2023
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Wafer support table with ceramic substrate including core and surfa...
    • Patent number 11,574,822
    • Issue date Feb 7, 2023
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ceramic heater
    • Patent number 11,483,901
    • Issue date Oct 25, 2022
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Ceramic heater and manufacturing method for tubular shaft
    • Patent number 11,367,631
    • Issue date Jun 21, 2022
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck having an annular outer region covered by an in...
    • Patent number 11,223,302
    • Issue date Jan 11, 2022
    • NGK Insulators, Ltd.
    • Reo Watanabe
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Wafer support
    • Patent number 10,861,680
    • Issue date Dec 8, 2020
    • NGK Insulators, Ltd.
    • Daiki Maeda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Ceramic heater
    • Patent number 10,566,218
    • Issue date Feb 18, 2020
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Member for semiconductor manufacturing apparatus and method for man...
    • Patent number 9,548,226
    • Issue date Jan 17, 2017
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Heating device and semiconductor manufacturing apparatus
    • Patent number 9,123,757
    • Issue date Sep 1, 2015
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Processing device
    • Patent number 8,394,199
    • Issue date Mar 12, 2013
    • NGK Insulators, Ltd.
    • Yasumitsu Tomita
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Uniform temperature heater
    • Patent number 8,193,473
    • Issue date Jun 5, 2012
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Position accuracy evaluation method and position accuracy evaluatio...
    • Patent number 7,948,516
    • Issue date May 24, 2011
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Susceptor for semiconductor manufacturing apparatus
    • Patent number 7,686,889
    • Issue date Mar 30, 2010
    • NGK Insulators, Ltd.
    • Taiji Kiku
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Gas providing member and processing device
    • Patent number 7,632,356
    • Issue date Dec 15, 2009
    • NGK Insulators, Ltd.
    • Yasumitsu Tomita
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing device
    • Patent number 7,560,668
    • Issue date Jul 14, 2009
    • NGK Insulators, Ltd.
    • Yasumitsu Tomita
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Heating device
    • Patent number 7,432,474
    • Issue date Oct 7, 2008
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • F27 - FURNACES KILNS OVENS RETORTS
  • Information Patent Grant

    Method of manufacturing a substrate heating device
    • Patent number 7,401,399
    • Issue date Jul 22, 2008
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Heater and method of manufacturing the same
    • Patent number 7,345,260
    • Issue date Mar 18, 2008
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Heating apparatus
    • Patent number 7,279,661
    • Issue date Oct 9, 2007
    • NGK Insulators, Ltd.
    • Hisakazu Okajima
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Heating device
    • Patent number 7,173,220
    • Issue date Feb 6, 2007
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Ceramic heaters
    • Patent number 6,958,462
    • Issue date Oct 25, 2005
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Heating system
    • Patent number 6,875,960
    • Issue date Apr 5, 2005
    • NGK Insulators, Ltd.
    • Shinji Yamaguchi
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    CERAMIC SUSCEPTOR
    • Publication number 20250038041
    • Publication date Jan 30, 2025
    • NGK Insulators, Ltd.
    • Yutaka UNNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20240242943
    • Publication date Jul 18, 2024
    • NGK Insulators, Ltd.
    • Tomohiro HARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    JOINED STRUCTURE
    • Publication number 20230317431
    • Publication date Oct 5, 2023
    • NGK Insulators, Ltd.
    • Yutaka UNNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER SUPPORT TABLE AND RF ROD
    • Publication number 20230058637
    • Publication date Feb 23, 2023
    • NGK Insulators, Ltd.
    • Yutaka UNNO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CERAMIC HEATER
    • Publication number 20220174788
    • Publication date Jun 2, 2022
    • NGK Insulators, Ltd.
    • Tomohiro HARA
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    CERAMIC HEATER
    • Publication number 20220112599
    • Publication date Apr 14, 2022
    • NGK Insulators, Ltd.
    • Tomohiro HARA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    WAFER PLACEMENT TABLE AND METHOD FOR MANUFACTURING THE SAME
    • Publication number 20210007181
    • Publication date Jan 7, 2021
    • NGK Insulators, Ltd.
    • Yutaka UNNO
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    MULTI-ZONE HEATER
    • Publication number 20200396801
    • Publication date Dec 17, 2020
    • NGK Insulators, Ltd.
    • Yutaka UNNO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ELECTROSTATIC-CHUCK HEATER
    • Publication number 20200312696
    • Publication date Oct 1, 2020
    • NGK Insulators, Ltd.
    • Yutaka UNNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CERAMIC HEATER
    • Publication number 20200163165
    • Publication date May 21, 2020
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    ELECTROSTATIC-CHUCK HEATER
    • Publication number 20200126773
    • Publication date Apr 23, 2020
    • NGK Insulators, Ltd.
    • Yutaka UNNO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ELECTROSTATIC CHUCK
    • Publication number 20200111697
    • Publication date Apr 9, 2020
    • NGK Insulators, Ltd.
    • Reo WATANABE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER SUPPORT TABLE
    • Publication number 20200090964
    • Publication date Mar 19, 2020
    • NGK Insulators, Ltd.
    • Yutaka UNNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CERAMIC HEATER AND MANUFACTURING METHOD FOR TUBULAR SHAFT
    • Publication number 20200075361
    • Publication date Mar 5, 2020
    • NGK Insulators, Ltd.
    • Yutaka UNNO
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    WAFER SUPPORT
    • Publication number 20180218885
    • Publication date Aug 2, 2018
    • NGK Insulators, Ltd.
    • Daiki Maeda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CERAMIC HEATER
    • Publication number 20180204748
    • Publication date Jul 19, 2018
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    JOINED STRUCTURE
    • Publication number 20170069520
    • Publication date Mar 9, 2017
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MAN...
    • Publication number 20140117119
    • Publication date May 1, 2014
    • NGK Insulators, Ltd.
    • Yutaka UNNO
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    HEATING DEVICE AND SEMICONDUCTOR MANUFACTURING APPARATUS
    • Publication number 20130248509
    • Publication date Sep 26, 2013
    • NGK Insulators, Ltd.
    • Yutaka UNNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    HEATING UNIT
    • Publication number 20090200289
    • Publication date Aug 13, 2009
    • NGK INSULATORS, LTD.
    • Yutaka UNNO
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    SUSCEPTOR FOR SEMICONDUCTOR MANUFACTURING APPARATUS
    • Publication number 20080236479
    • Publication date Oct 2, 2008
    • NGK Insulators, Ltd.
    • Taiji Kiku
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HEATING DEVICE
    • Publication number 20070221648
    • Publication date Sep 27, 2007
    • NGK Insulators, Ltd.
    • Yutaka UNNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Heater and method of manufacturing the same
    • Publication number 20060289449
    • Publication date Dec 28, 2006
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Substrate processing device
    • Publication number 20060280875
    • Publication date Dec 14, 2006
    • NGK Insulators, Ltd.
    • Yasumitsu Tomita
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma processing device
    • Publication number 20060267494
    • Publication date Nov 30, 2006
    • NGK Insulators, Ltd.
    • Yasumitsu Tomita
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Processing device
    • Publication number 20060219176
    • Publication date Oct 5, 2006
    • NGK Insulators, Ltd.
    • Yasumitsu Tomita
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Gas providing member and processing device
    • Publication number 20060207509
    • Publication date Sep 21, 2006
    • NGK Insulators, Ltd.
    • Yasumitsu Tomita
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Position accuracy evaluation method and position accuracy evaluatio...
    • Publication number 20060207987
    • Publication date Sep 21, 2006
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Substrate heating device and manufacturing method for the same
    • Publication number 20050210974
    • Publication date Sep 29, 2005
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Heating device
    • Publication number 20050211691
    • Publication date Sep 29, 2005
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR