Yutaka Yamahira

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Kumamoto, JP

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Patents Grantslast 30 patents

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Substitute processing apparatus with power distribution control for...
- Patent number 6,311,091
- Issue date Oct 30, 2001
- Tokyo Electric Limited
- Yutaka Yamahira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for washing substrates
- Patent number 5,498,294
- Issue date Mar 12, 1996
- Tokyo Electron Limited
- Michiaki Matsushita
- H01 - BASIC ELECTRIC ELEMENTS