Yutao Ma

Person

  • Fremont, CA, US

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    PAD CONDITIONER

    • Publication number 20080254722
    • Publication date Oct 16, 2008
    • APPLIED MATERIALS, INC.
    • Kun Xu
    • B24 - GRINDING POLISHING
  • Information Patent Application

    Web pad design for chemical mechanical polishing

    • Publication number 20030224678
    • Publication date Dec 4, 2003
    • APPLIED MATERIALS, INC.
    • Wei-Yung Hsu
    • B24 - GRINDING POLISHING
  • Information Patent Application

    Method and apparatus for hard pad polishing

    • Publication number 20020090886
    • Publication date Jul 11, 2002
    • APPLIED MATERIALS, INC.
    • Ajoy Zutshi
    • B24 - GRINDING POLISHING
  • Information Patent Application

    Multi-step conditioning process

    • Publication number 20010029155
    • Publication date Oct 11, 2001
    • APPLIED MATERIALS, INC.
    • Doyle E. Bennett
    • B24 - GRINDING POLISHING