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Yutaro OTOMO
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Joetsu-shi, JP
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last 30 patents
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Patent Application
Resist Material, Resist Composition, Patterning Process, And Monomer
Publication number
20240361690
Publication date
Oct 31, 2024
Shin-Etsu Chemical Co., Ltd.
Jun HATAKEYAMA
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Resist Material, Resist Composition, And Patterning Process
Publication number
20240361691
Publication date
Oct 31, 2024
Shin-Etsu Chemical Co., Ltd.
Yutaro OTOMO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Monomer, Resist Material, Resist Composition, And Patterning Process
Publication number
20240360069
Publication date
Oct 31, 2024
Shin-Etsu Chemical Co., Ltd.
Yutaro OTOMO
C07 - ORGANIC CHEMISTRY
Information
Patent Application
RESIST COMPOSITION AND PATTERN FORMING PROCESS
Publication number
20240210830
Publication date
Jun 27, 2024
Shin-Etsu Chemical Co., Ltd.
Masaki Ohashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION AND PATTERN FORMING PROCESS
Publication number
20240053678
Publication date
Feb 15, 2024
Shin-Etsu Chemical Co., Ltd.
Yutaro Otomo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST MATERIAL AND PATTERN FORMING METHOD
Publication number
20230296980
Publication date
Sep 21, 2023
Shin-Etsu Chemical Co., Ltd.
Yutaro OTOMO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST MATERIAL AND PATTERNING PROCESS
Publication number
20230296981
Publication date
Sep 21, 2023
Shin-Etsu Chemical Co., Ltd.
Gentaro HIDA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POLYMER, RESIST COMPOSITION, AND PATTERN FORMING METHOD
Publication number
20230244142
Publication date
Aug 3, 2023
Shin-Etsu Chemical Co., Ltd.
Masahiro FUKUSHIMA
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...