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Patents Grantslast 30 patents

Information Patent Grant
Information processing device, recording medium, and process condit...
- Patent number 12,253,838
- Issue date Mar 18, 2025
- Tokyo Electron Limited
- Yuto Noda
- G05 - CONTROLLING REGULATING
Information Patent Grant
Heat treatment apparatus, regulation method of heat treatment appar...
- Patent number 10,641,553
- Issue date May 5, 2020
- Tokyo Electron Limited
- Yuto Noda
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
INFORMATION PROCESSING DEVICE, RECORDING MEDIUM, AND PROCESS CONDIT...
- Publication number 20220244685
- Publication date Aug 4, 2022
- TOKYO ELECTRON LIMITED
- Yuto NODA
- G05 - CONTROLLING REGULATING
Information Patent Application
HEAT TREATMENT APPARATUS, REGULATION METHOD OF HEAT TREATMENT APPAR...
- Publication number 20160363373
- Publication date Dec 15, 2016
- TOKYO ELECTRON LIMITED
- Yuto Noda
- G06 - COMPUTING CALCULATING COUNTING