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Yuugo Tai
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Yokkaichi-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Chemical mechanical polishing pad
Patent number
8,128,464
Issue date
Mar 6, 2012
JSR Corporation
Masayuki Motonari
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
CHEMICAL MECHANICAL POLISHING PAD
Publication number
20090209185
Publication date
Aug 20, 2009
JSR Corporation
Masayuki Motonari
B24 - GRINDING POLISHING