Yuuhei Matsumura

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Utsunomiya, JP

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Patents Grantslast 30 patents

Information Patent Grant
Original holding apparatus, exposure apparatus, method of manufactu...
- Patent number 9,665,015
- Issue date May 30, 2017
- Canon Kabushiki Kaisha
- Yuuhei Matsumura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, device manufacturing method using same, and gas...
- Patent number 9,256,141
- Issue date Feb 9, 2016
- Canon Kabushiki Kaisha
- Naoki Yamaguchi
- F24 - HEATING RANGES VENTILATING
Information Patent Grant
Temperature regulating apparatus, exposure system, and device manuf...
- Patent number 8,131,404
- Issue date Mar 6, 2012
- Canon Kabushiki Kaisha
- Yoshiyuki Okada
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
ORIGINAL HOLDING APPARATUS, EXPOSURE APPARATUS, METHOD OF MANUFACTU...
- Publication number 20150131073
- Publication date May 14, 2015
- Canon Kabushiki Kaisha
- Yuuhei MATSUMURA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD USING SAME, AND GAS...
- Publication number 20110261333
- Publication date Oct 27, 2011
- Canon Kabushiki Kaisha
- Naoki YAMAGUCHI
- F24 - HEATING RANGES VENTILATING
Information Patent Application
TEMPERATURE REGULATING APPARATUS, EXPOSURE SYSTEM, AND DEVICE MANUF...
- Publication number 20100004796
- Publication date Jan 7, 2010
- Canon Kabushiki Kaisha
- Yoshiyuki Okada
- G05 - CONTROLLING REGULATING