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Annaka, JP
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last 30 patents
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Patent Grant
Method for heat treatment of silicon wafers and silicon wafer
Patent number
7,011,717
Issue date
Mar 14, 2006
Shin-Etsu Handotai Co., Ltd.
Norihiro Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for heat treatment of silicon wafers and silicon wafer
Patent number
6,809,015
Issue date
Oct 26, 2004
Shin-Etsu Handotai Co., Ltd.
Norihiro Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for thermally annealing silicon wafer and silicon wafer
Patent number
6,573,159
Issue date
Jun 3, 2003
Shin-Etsu Handotai Co., Ltd.
Norihiro Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Method for heat treatment of silicon wafers and silicon wafer
Publication number
20050025691
Publication date
Feb 3, 2005
Shin-Etsu Handotai Co., Ltd.
Norihiro Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for heat treatment of silicon wafers and silicon wafer
Publication number
20030104709
Publication date
Jun 5, 2003
SHIN-ETSU HANDOTAI CO., LTD.
Norihiro Kobayashi
H01 - BASIC ELECTRIC ELEMENTS