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Yuuichi OISHI
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Sammu-shi, JP
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last 30 patents
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Patent Grant
Magnetron sputtering apparatus and magnetron sputtering method
Patent number
8,221,594
Issue date
Jul 17, 2012
Ulvac, Inc.
Yasuhiko Akamatsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
MAGNETRON SPUTTERING APPARATUS AND MAGNETRON SPUTTERING METHOD
Publication number
20110048926
Publication date
Mar 3, 2011
ULVAC, Inc.
Yasuhiko AKAMATSU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
METHOD FOR PRODUCING A THIN FILM TRANSISTOR AND METHOD FOR FORMING...
Publication number
20100075475
Publication date
Mar 25, 2010
ULVAC, Inc.
Satoru TAKASAWA
H01 - BASIC ELECTRIC ELEMENTS