Yuuichi Tachino

Follow

Person

Kasugai-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma etching method and apparatus
- Patent number 7,906,033
- Issue date Mar 15, 2011
- Fujitsu Semiconductor Limited
- Yuuichi Tachino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method and apparatus
- Patent number 6,926,800
- Issue date Aug 9, 2005
- Fujitsu Limited
- Yuuichi Tachino
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND FABRICATION PROCESS OF A SEMICON...
- Publication number 20120231553
- Publication date Sep 13, 2012
- FUJITSU SEMICONDUCTOR LIMITED
- Yoichi OKITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and fabrication process of a semicon...
- Publication number 20070178698
- Publication date Aug 2, 2007
- FUJITSU LIMITED
- Yoichi Okita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma etching method and apparatus
- Publication number 20050252885
- Publication date Nov 17, 2005
- FUJITSU LIMITED
- Yuuichi Tachino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma etching method and apparatus
- Publication number 20020023896
- Publication date Feb 28, 2002
- Yuuichi Tachino
- H01 - BASIC ELECTRIC ELEMENTS