Yuuichi Yamamoto

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Patents Grantslast 30 patents

Information Patent Grant
Coating and developing apparatus, coating and developing method and...
- Patent number 8,506,186
- Issue date Aug 13, 2013
- Tokyo Electron Limited
- Shinichi Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing apparatus, coating and developing method and...
- Patent number 8,480,319
- Issue date Jul 9, 2013
- Tokyo Electron Limited
- Shinichi Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method, program, computer-readable storage med...
- Patent number 8,007,968
- Issue date Aug 30, 2011
- Tokyo Electron Limited
- Yoshiaki Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, program, computer-readable recording m...
- Patent number 7,901,149
- Issue date Mar 8, 2011
- Tokyo Electron Limited
- Yoshiaki Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment method and system for electromagnet in high-energy accele...
- Patent number 7,522,026
- Issue date Apr 21, 2009
- Hitachi Plant Technologies, Ltd.
- Takashi Kitahara
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD AND...
- Publication number 20120063765
- Publication date Mar 15, 2012
- TOKYO ELECTRON LIMITED
- Shinichi HAYASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD AND...
- Publication number 20120057862
- Publication date Mar 8, 2012
- TOKYO ELECTRON LIMITED
- Shinichi HAYASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD, PROGRAM, COMPUTER-READABLE STORAGE MED...
- Publication number 20090258304
- Publication date Oct 15, 2009
- TOKYO ELECTRON LIMITED
- Yoshiaki Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, PROGRAM, COMPUTER-READABLE RECORDING M...
- Publication number 20090208879
- Publication date Aug 20, 2009
- TOKYO ELECTRON LIMITED
- Yoshiaki Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment Method and System for Electromagnet in High-Energy Accele...
- Publication number 20070273464
- Publication date Nov 29, 2007
- Hitachi Plant Technologies, Ltd.
- Takashi KITAHARA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR