Yuuichiro Yamazaki

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Tokyo-To, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate inspecting system using electron beam and substrate inspe...
- Patent number 6,563,114
- Issue date May 13, 2003
- Kabushiki Kaisha Toshiba
- Ichirota Nagahama
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus and method of controlling charged p...
- Patent number 6,414,323
- Issue date Jul 2, 2002
- Kabushiki Kaisha Toshiba
- Hideaki Abe
- G01 - MEASURING TESTING