Yuuji Kamikawa

Person

Uto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate washing method, substrate washing-drying method, substrat...
- Patent number 6,001,191
- Issue date Dec 14, 1999
- Tokyo Electron Limited
- Yuuji Kamikawa
- B08 - CLEANING
Information Patent Grant
Washing apparatus, and washing method
- Patent number 5,887,604
- Issue date Mar 30, 1999
- Tokyo Electron Limited
- Shinya Murakami
- B08 - CLEANING
Information Patent Grant
Substrate washing and drying apparatus, substrate washing method, a...
- Patent number 5,845,660
- Issue date Dec 8, 1998
- Tokyo Electron Limited
- Naoki Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for washing objects
- Patent number 5,782,990
- Issue date Jul 21, 1998
- Tokyo Electron Limited
- Shinya Murakami
- B08 - CLEANING
Information Patent Grant
Washing apparatus, and washing method
- Patent number 5,671,764
- Issue date Sep 30, 1997
- Tokyo Electron Limited
- Shinya Murakami
- B08 - CLEANING
Information Patent Grant
Apparatus and method for drying substrates
- Patent number 5,443,540
- Issue date Aug 22, 1995
- Tokyo Electron Limited
- Yuuji Kamikawa
- F26 - DRYING
Information Patent Grant
Wafer drying apparatus and fire-extinguishing method therefor
- Patent number 5,431,179
- Issue date Jul 11, 1995
- Tokyo Electron Limited
- Takanori Miyazaki
- F26 - DRYING
Information Patent Grant
Substrate washing device
- Patent number 5,370,142
- Issue date Dec 6, 1994
- Tokyo Electron Limited
- Mitsuo Nishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate drying apparatus
- Patent number 5,369,891
- Issue date Dec 6, 1994
- Tokyo Electron Limited
- Yuuji Kamikawa
- F26 - DRYING
Information Patent Grant
Washing system
- Patent number 5,301,700
- Issue date Apr 12, 1994
- Tokyo Electron Limited
- Yuuji Kamikawa
- B08 - CLEANING
Information Patent Grant
Transfer apparatus
- Patent number 5,253,663
- Issue date Oct 19, 1993
- Tokyo Electron Limited
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS

Yuuji Kamikawa

Person

Patents Grantslast 30 patents

Substrate washing method, substrate washing-drying method, substrat...

Washing apparatus, and washing method

Substrate washing and drying apparatus, substrate washing method, a...

Method for washing objects

Washing apparatus, and washing method

Apparatus and method for drying substrates

Wafer drying apparatus and fire-extinguishing method therefor

Substrate washing device

Substrate drying apparatus

Washing system

Transfer apparatus