Yuuji Kamikawa

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Patents Grantslast 30 patents

Information Patent Grant
Processing apparatus with a gas distributor having back and forth p...
- Patent number 5,445,699
- Issue date Aug 29, 1995
- Tokyo Electron Kyushu Limited
- Yuuji Kamikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...