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Yuuji Matoba
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Kobe, JP
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last 30 patents
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Patent Grant
Steam supplying apparatus and method for controlling same
Patent number
6,115,538
Issue date
Sep 5, 2000
Fujitsu Limited
Keisuke Shinagawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Method for controlling apparatus for supplying steam for ashing pro...
Patent number
5,832,177
Issue date
Nov 3, 1998
Fujitsu Limited
Keisuke Shinagawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...