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Yuuji Matsuyama
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Kumamoto-ken, JP
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Patents Grants
last 30 patents
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Patent Grant
Coating apparatus and method of controlling the same
Patent number
5,908,657
Issue date
Jun 1, 1999
Tokyo Electron Limited
Yoshio Kimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for supplying a treatment material
Patent number
5,733,375
Issue date
Mar 31, 1998
Tokyo Electron Limited
Takahide Fukuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Coating apparatus and method of controlling the same
Patent number
5,711,809
Issue date
Jan 27, 1998
Tokyo Electron Limited
Yoshio Kimura
H01 - BASIC ELECTRIC ELEMENTS