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Yuuji Takagi
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Kamakura, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and method for monitoring semiconductor device manufactur...
Patent number
8,547,429
Issue date
Oct 1, 2013
Hitachi High-Technologies Corporation
Toshifumi Honda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Observing method and its apparatus using electron microscope
Patent number
7,598,491
Issue date
Oct 6, 2009
Hitachi High-Technologies Corporation
Munenori Fukunishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of observing exposure condition for exposing semiconductor d...
Patent number
6,913,861
Issue date
Jul 5, 2005
Hitachi High-Technologies Corporation
Chie Shishido
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for inspecting defects in a semiconductor wafer
Patent number
6,792,366
Issue date
Sep 14, 2004
Hitachi, Ltd.
Naoki Hosoya
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for inspecting defects in a semiconductor wafer
Patent number
6,792,367
Issue date
Sep 14, 2004
Hitachi, Ltd.
Naoki Hosoya
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method of producing numerical control data for inspecting assembled...
Patent number
5,134,575
Issue date
Jul 28, 1992
Hitachi, Ltd.
Yuuji Takagi
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
System and method for monitoring semiconductor device manufacturing...
Publication number
20090231424
Publication date
Sep 17, 2009
Toshifumi Honda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Observing method and its apparatus using electron microscope
Publication number
20060289752
Publication date
Dec 28, 2006
Munenori Fukunishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for inspecting defects in a semiconductor wafer
Publication number
20030109952
Publication date
Jun 12, 2003
Hitachi, Ltd
Naoki Hosoya
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method and apparatus for inspecting defects in a semiconductor wafer
Publication number
20030109070
Publication date
Jun 12, 2003
Hitachi, Ltd
Naoki Hosoya
G06 - COMPUTING CALCULATING COUNTING