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Yuuki Ishii
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Yokohama City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Immersion exposure apparatus and device manufacturing method with n...
Patent number
8,064,037
Issue date
Nov 22, 2011
Nikon Corporation
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Immersion exposure apparatus and device manufacturing method with n...
Patent number
7,961,289
Issue date
Jun 14, 2011
Nikon Corporation
Hiroyuki Nagasaka
Information
Patent Grant
Control method, control system, and program
Patent number
7,941,232
Issue date
May 10, 2011
Nikon Corporation
Yuuki Ishii
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and device manufacturing method
Patent number
7,385,674
Issue date
Jun 10, 2008
Nikon Corporation
Yuuki Ishii
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and device manufacturing method
Patent number
7,359,034
Issue date
Apr 15, 2008
Nikon Corporation
Yuuki Ishii
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and method
Patent number
6,549,271
Issue date
Apr 15, 2003
Nikon Corporation
Masahiko Yasuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus
Patent number
5,872,618
Issue date
Feb 16, 1999
Nikon Corporation
Tadashi Nagayama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD AND DEVICE MANUFACTURING METHOD
Publication number
20170299966
Publication date
Oct 19, 2017
Nikon Corporation
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Control method, control system, and program
Publication number
20080221709
Publication date
Sep 11, 2008
Nikon Corporation
Yuuki Ishii
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Positioning method, processing system, measurement method of substr...
Publication number
20080013089
Publication date
Jan 17, 2008
Nikon Corporation
Yuuki Ishii
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Pre-measurement processing method, exposure system and substrate pr...
Publication number
20070052939
Publication date
Mar 8, 2007
Nikon Corporation
Yuuki Ishii
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus and device manufacturing method
Publication number
20060152698
Publication date
Jul 13, 2006
Nikon Corporation
Yuuki Ishii
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus, exposure method and device manufacturing method
Publication number
20060139593
Publication date
Jun 29, 2006
Nikon Corporation
Hiroyuki Nagasaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus and device manufacturing method
Publication number
20060061747
Publication date
Mar 23, 2006
Nikon Corporation
Yuuki Ishii
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus and method
Publication number
20030016338
Publication date
Jan 23, 2003
Nikon Corporation
Masahiko Yasuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY