Yuuki KOBAYASHI

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and measurement method
- Patent number 9,658,106
- Issue date May 23, 2017
- Tokyo Electron Limited
- Yuuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Doping method, doping apparatus and method of manufacturing semicon...
- Patent number 9,472,404
- Issue date Oct 18, 2016
- Tokyo Electron Limited
- Hirokazu Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pulsed gas plasma doping method and apparatus
- Patent number 9,165,771
- Issue date Oct 20, 2015
- Tokyo Electron Limited
- Peter Ventzek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma doping apparatus and plasma doping method
- Patent number 9,029,249
- Issue date May 12, 2015
- Tokyo Electron Limited
- Hirokazu Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Solid state source introduction of dopants and additives for a plas...
- Patent number 8,889,534
- Issue date Nov 18, 2014
- Tokyo Electron Limited
- Peter L. G. Ventzek
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DOPING METHOD, DOPING APPARATUS, AND SEMICONDUCTOR ELEMENT MANUFACT...
- Publication number 20180012763
- Publication date Jan 11, 2018
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DOPING METHOD AND SEMICONDUCTOR ELEMENT MANUFACTURING METHOD
- Publication number 20160189963
- Publication date Jun 30, 2016
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND MEASUREMENT METHOD
- Publication number 20150318220
- Publication date Nov 5, 2015
- TOKYO ELECTRON LIMITED
- Yuuki KOBAYASHI
- G01 - MEASURING TESTING
Information Patent Application
DOPING METHOD, DOPING APPARATUS AND METHOD OF MANUFACTURING SEMICON...
- Publication number 20150187582
- Publication date Jul 2, 2015
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA DOPING APPARATUS, PLASMA DOPING METHOD, SEMICONDUCTOR DEVICE...
- Publication number 20140357068
- Publication date Dec 4, 2014
- TOKYO ELECTRON LIMITED
- Masahiro Horigome
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID STATE SOURCE INTRODUCTION OF DOPANTS AND ADDITIVES FOR A PLAS...
- Publication number 20140356984
- Publication date Dec 4, 2014
- TOKYO ELECTRON LIMITED
- Peter L. G. Ventzek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PULSED GAS PLASMA DOPING METHOD AND APPARATUS
- Publication number 20140302666
- Publication date Oct 9, 2014
- TOKYO ELECTRON LIMITED
- Peter VENTZEK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA DOPING APPARATUS AND PLASMA DOPING METHOD
- Publication number 20140179028
- Publication date Jun 26, 2014
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA DOPING APPARATUS, PLASMA DOPING METHOD, AND METHOD FOR MANUF...
- Publication number 20140094024
- Publication date Apr 3, 2014
- TOKYO ELECTRON LIMITED
- Masahiro OKA
- H01 - BASIC ELECTRIC ELEMENTS

Yuuki KOBAYASHI

Person

Patents Grantslast 30 patents

Plasma processing apparatus and measurement method

Doping method, doping apparatus and method of manufacturing semicon...

Pulsed gas plasma doping method and apparatus

Plasma doping apparatus and plasma doping method

Solid state source introduction of dopants and additives for a plas...

Patents Applicationslast 30 patents

DOPING METHOD, DOPING APPARATUS, AND SEMICONDUCTOR ELEMENT MANUFACT...

DOPING METHOD AND SEMICONDUCTOR ELEMENT MANUFACTURING METHOD

PLASMA PROCESSING APPARATUS AND MEASUREMENT METHOD

DOPING METHOD, DOPING APPARATUS AND METHOD OF MANUFACTURING SEMICON...

PLASMA DOPING APPARATUS, PLASMA DOPING METHOD, SEMICONDUCTOR DEVICE...

SOLID STATE SOURCE INTRODUCTION OF DOPANTS AND ADDITIVES FOR A PLAS...

PULSED GAS PLASMA DOPING METHOD AND APPARATUS

PLASMA DOPING APPARATUS AND PLASMA DOPING METHOD

PLASMA DOPING APPARATUS, PLASMA DOPING METHOD, AND METHOD FOR MANUF...