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Yuuki Shiota
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Tokyo, JP
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last 30 patents
Information
Patent Grant
Halftone type phase shift mask blank and phase shift mask thereof
Patent number
7,862,963
Issue date
Jan 4, 2011
Hoya Corporation
Yuuki Shiota
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Halftone phase shift mask blank, halftone phase shift mask, and met...
Patent number
7,632,612
Issue date
Dec 15, 2009
Hoya Corporation
Yuuki Shiota
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Halftone type phase shift mask blank and phase shift mask thereof
Patent number
7,592,106
Issue date
Sep 22, 2009
Hoya Corporation
Yuuki Shiota
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Halftone type phase shift mask blank and phase shift mask thereof
Patent number
7,169,513
Issue date
Jan 30, 2007
Hoya Corporation
Yuuki Shiota
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Halftone phase shift mask blank, halftone phase shift mask, and met...
Patent number
7,115,341
Issue date
Oct 3, 2006
Hoya Corporation
Yuuki Shiota
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
HALFTONE TYPE PHASE SHIFT MASK BLANK AND PHASE SHIFT MASK THEREOF
Publication number
20100040961
Publication date
Feb 18, 2010
HOYA CORPORATION
Yuuki Shiota
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HALFTONE TYPE PHASE SHIFT MASK BLANK AND PHASE SHIFT MASK THEREOF
Publication number
20070092808
Publication date
Apr 26, 2007
Hoya Corporation
Yuuki Shiota
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Halftone phase shift mask blank, halftone phase shift mask, and met...
Publication number
20070082278
Publication date
Apr 12, 2007
Hoya Corporation
Yuuki Shiota
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Halftone phase shift mask blank, halftone phase shift mask, and met...
Publication number
20030180631
Publication date
Sep 25, 2003
Hoya Corporation
Yuuki Shiota
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Halftone type phase shift mask blank and phase shift mask thereof
Publication number
20030180630
Publication date
Sep 25, 2003
Hoya Corporation
Yuuki Shiota
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY