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Yuuki SUKA
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Joetsu-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Fluorinated ester monomer, making method, fluorinated ester polymer...
Patent number
9,261,783
Issue date
Feb 16, 2016
Shin-Etsu Chemical Co., Ltd.
Takeshi Kinsho
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Resist protective film-forming composition and patterning process
Patent number
9,086,628
Issue date
Jul 21, 2015
Shin-Etsu Chemical Co., Ltd.
Yuuki Suka
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Polymerizable ester compound, polymer, resist composition, and patt...
Patent number
8,795,946
Issue date
Aug 5, 2014
Shin-Etsu Chemical Co., Ltd.
Koji Hasegawa
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Fluorinated ester monomer, making method, fluorinated ester polymer...
Patent number
8,697,903
Issue date
Apr 15, 2014
Shin-Etsu Chemical Co., Ltd.
Takeshi Kinsho
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Polymer, resist composition, and patterning process
Patent number
8,420,292
Issue date
Apr 16, 2013
Shin-Etsu Chemical Co., Ltd.
Yuji Harada
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Patents Applications
last 30 patents
Information
Patent Application
FLUORINATED ESTER MONOMER, MAKING METHOD, FLUORINATED ESTER POLYMER...
Publication number
20140051024
Publication date
Feb 20, 2014
Shin-Etsu Chemical Co., Ltd.
Takeshi KINSHO
C07 - ORGANIC CHEMISTRY
Information
Patent Application
NEGATIVE PATTERN FORMING PROCESS AND NEGATIVE RESIST COMPOSITION
Publication number
20130130177
Publication date
May 23, 2013
Shin-Etsu Chemical Co., Ltd.
Tomohiro Kobayashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST PROTECTIVE FILM-FORMING COMPOSITION AND PATTERNING PROCESS
Publication number
20130084517
Publication date
Apr 4, 2013
Shin-Etsu Chemical Co., Ltd.
Yuuki Suka
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
PATTERNING PROCESS AND RESIST COMPOSITION
Publication number
20130065183
Publication date
Mar 14, 2013
Shin-Etsu Chemical Co., Ltd.
Tomohiro Kobayashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POLYMERIZABLE ESTER COMPOUND, POLYMER, RESIST COMPOSITION, AND PATT...
Publication number
20130017484
Publication date
Jan 17, 2013
Koji HASEGAWA
C07 - ORGANIC CHEMISTRY
Information
Patent Application
FLUORINATED ESTER MONOMER, MAKING METHOD, FLUORINATED ESTER POLYMER...
Publication number
20120083580
Publication date
Apr 5, 2012
Takeshi KINSHO
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS
Publication number
20110177455
Publication date
Jul 21, 2011
Yuji HARADA
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...