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Yuuko Kiridoshi
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Tokyo, JP
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last 30 patents
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Patent Grant
Composition for resist pattern-refinement, and fine pattern-forming...
Patent number
9,354,523
Issue date
May 31, 2016
JSR Corporation
Yuuko Kiridoshi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
COMPOSITION FOR FORMING FINE RESIST PATTERN, AND FINE PATTERN-FORMI...
Publication number
20160011513
Publication date
Jan 14, 2016
JSR Corporation
Yuuko Kiridoshi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY