Yuusuke TAKAMATSU

Follow

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Liquid processing apparatus
- Patent number 9,348,340
- Issue date May 24, 2016
- Tokyo Electron Limited
- Mikio Nakashima
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20150053285
- Publication date Feb 26, 2015
- TOKYO ELECTRON LIMITED
- Mikio NAKASHIMA
- H01 - BASIC ELECTRIC ELEMENTS