Yuusuke Takegawa

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 9,887,070
- Issue date Feb 6, 2018
- Hitachi High-Technologies Corporation
- Takao Arase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 9,779,919
- Issue date Oct 3, 2017
- Hitachi High-Technologies Corporation
- Takao Arase
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20170338086
- Publication date Nov 23, 2017
- Hitachi High-Technologies Corporation
- Takao Arase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20160203958
- Publication date Jul 14, 2016
- Hitachi High-Technologies Corporation
- Takao Arase
- H01 - BASIC ELECTRIC ELEMENTS