Yuuta TAKEDA

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Ube-shi, Yamaguchi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Dry etching method, method for manufacturing semiconductor device,...
- Patent number 11,618,954
- Issue date Apr 4, 2023
- Central Glass Company, Limited
- Yuuta Takeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing gas, storage container, and substrate processi...
- Patent number 11,447,697
- Issue date Sep 20, 2022
- Central Glass Company, Limited
- Akifumi Yao
- C01 - INORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
DRY ETCHING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE,...
- Publication number 20220056593
- Publication date Feb 24, 2022
- Central Glass Company, Limited
- Yuuta TAKEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING GAS, STORAGE CONTAINER, AND SUBSTRATE PROCESSI...
- Publication number 20210054275
- Publication date Feb 25, 2021
- Central Glass Company, Limited
- Akifumi YAO
- H01 - BASIC ELECTRIC ELEMENTS