Yuuzou Oohirabaru

Person

Kudamatsu-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 10,727,088
- Issue date Jul 28, 2020
- HITACHI HIGH-TECH CORPORATION
- Michikazu Morimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 10,559,481
- Issue date Feb 11, 2020
- Hitachi High-Technologies Corporation
- Michikazu Morimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 10,522,331
- Issue date Dec 31, 2019
- Hitachi High-Technologies Corporation
- Yasuo Ohgoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 9,831,096
- Issue date Nov 28, 2017
- Hitachi High-Technologies Corporation
- Hiromitsu Terauchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 9,514,967
- Issue date Dec 6, 2016
- Hitachi High-Technologies Corporation
- Yasuo Ohgoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 9,305,803
- Issue date Apr 5, 2016
- Hitachi High-Technologies Corporation
- Michikazu Morimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus
- Patent number 7,585,383
- Issue date Sep 8, 2009
- Hitachi High-Technologies Corporation
- Yuuzou Oohirabaru
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing method and vacuum processing apparatus
- Patent number 7,353,076
- Issue date Apr 1, 2008
- Hitachi High-Technologies Corporation
- Nobuo Nagayasu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20170040143
- Publication date Feb 9, 2017
- Hitachi High-Technologies Corporation
- Yasuo OHGOSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20170025289
- Publication date Jan 26, 2017
- Hitachi High-Technologies Corporation
- Michikazu Morimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20160211153
- Publication date Jul 21, 2016
- Hitachi High-Technologies Corporation
- Hiromitsu TERAUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20160181131
- Publication date Jun 23, 2016
- Hitachi High-Technologies Corporation
- Michikazu Morimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20140057445
- Publication date Feb 27, 2014
- Hitachi High-Technologies Corporation
- Michikazu MORIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20140020831
- Publication date Jan 23, 2014
- Hitachi High-Technologies Corporation
- Yasuo OHGOSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20120252219
- Publication date Oct 4, 2012
- Hitachi High-Technologies Corporation
- Michikazu MORIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANALOG INPUT AND OUTPUT CIRCUIT AND VACUUM PROCESSING APPARATUS
- Publication number 20100207790
- Publication date Aug 19, 2010
- Hitachi High-Technologies Corporation
- Koji Toyota
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Vacuum processing method and vacuum processing apparatus
- Publication number 20070100488
- Publication date May 3, 2007
- Nobuo Nagayasu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vacuum processing apparatus
- Publication number 20050193948
- Publication date Sep 8, 2005
- Yuuzou Oohirabaru
- H01 - BASIC ELECTRIC ELEMENTS

Yuuzou Oohirabaru

Person

Patents Grantslast 30 patents

Plasma processing apparatus and plasma processing method

Plasma processing apparatus and plasma processing method

Plasma processing apparatus

Plasma processing method and plasma processing apparatus

Plasma processing apparatus

Plasma processing apparatus and plasma processing method

Vacuum processing apparatus

Vacuum processing method and vacuum processing apparatus

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

ANALOG INPUT AND OUTPUT CIRCUIT AND VACUUM PROCESSING APPARATUS

Vacuum processing method and vacuum processing apparatus

Vacuum processing apparatus